Home50 nm THICK ALUMINUM NITRIDE PIEZOELECTRIC NANO-PLATE RESONANT THERMAL DETECTORS 50 nm THICK ALUMINUM NITRIDE PIEZOELECTRIC NANO-PLATE RESONANT THERMAL DETECTORS Z. Qian, S. Kang, V. Rajaram and M. Rinaldi, Northeastern University, Boston, Massachusetts, USA HH2016_50nm_AlN_IRDownload